Whole-Angle MEMS Gyroscopes. Doruk Senkal

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Название Whole-Angle MEMS Gyroscopes
Автор произведения Doruk Senkal
Жанр Техническая литература
Серия
Издательство Техническая литература
Год выпуска 0
isbn 9781119441922



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      Doruk Senkal

      He received his PhD degree (2015) in Mechanical and Aerospace Engineering from the University of California, Irvine, with a focus on MEMS Coriolis Vibratory Gyroscopes, received his MSc degree (2009) in Mechanical Engineering from Washington State University with a focus on robotics, and received his BSc degree (2007) in Mechanical Engineering from Middle East Technical University.

      His research interests, represented in over 20 international conference papers, 9 peer‐reviewed journal papers, and 16 patent applications, encompass all aspects of MEMS inertial sensor development, including sensor design, device fabrication, algorithms, and control.

      Andrei M. Shkel

Part I Fundamentals of Whole‐Angle Gyroscopes

      Historically, first examples of CVGs can be found in the Aerospace Industry, which were primarily used for navigation and platform stabilization applications. Later, advent of Micro‐electromechanical System (MEMS) fabrication techniques brought along orders of magnitude reduction in cost, size, weight, and power (CSWaP), which made CVGs truly ubiquitous. Today CVGs are used in a wide variety of civilian applications, examples include:

       Industrial applications, such as robotics and automation;

       Automobile stabilization, traction control, and roll‐over detection;

       Gesture recognition and localization in gaming and mobile devices;

       Optical image stabilization (OIS) of cameras;

       Head tracking in Augmented Reality (AR) and Virtual Reality (VR);

       Autonomous vehicles, such as self‐driving cars and Unmanned Aerial Vehicles (UAVs).

‐axis) gyroscopes, which have
symmetry (
of 0 Hz), and nondegenerate mode gyroscopes, which are designed intentionally to be asymmetric in
and
modes (
). Degenerate mode
‐axis gyroscopes offer a number of unique advantages compared to nondegenerate vibratory rate gyroscopes, including higher rate sensitivity, ability to implement whole‐angle mechanization with mechanically unlimited dynamic range, exceptional scale factor stability, and a potential for self‐calibration.

‐axis gyroscope and its vibratory modes along
‐ and
‐axis.

      1.1.1 Nondegenerate Mode Gyroscopes

      Nondegenerate mode CVGs are currently being used in a variety of commercial applications due to ease of fabrication and lower cost. Most common implementations utilize two to four vibratory modes for sensing angular velocity along one to three axes. This is commonly achieved by forcing a proof mass structure into oscillation in a so‐called “drive” mode and sensing the oscillation on one or more “sense” modes. For example, the

‐axis of the gyroscope in Figure 1.1, can be instrumented as a drive mode and the
‐axis can be instrumented as a sense mode. When a nonzero angular velocity is exerted (i.e. along the
‐axis in Figure 1.1), the resultant Coriolis force causes the sense mode (i.e. the mode along the
‐axis in Figure 1.1) to oscillate at the drive frequency at an amplitude proportional to input angular velocity.

      Resonance frequency of sense modes are typically designed to be several hundreds to a few thousand hertzs away from the drive frequency. The existence of this so‐called drive‐sense separation (

) makes nondegenerate mode gyroscopes robust to fabrication imperfections. However, a trade‐off