Whole-Angle MEMS Gyroscopes. Doruk Senkal

      

      Table of Contents

      1  Cover

      2  List of Abbreviations

      3  Preface

      4  About the Authors

      5  Part I: Fundamentals of Whole‐Angle Gyroscopes 1 Introduction 1.1 Types of Coriolis Vibratory Gyroscopes 1.2 Generalized CVG Errors 1.3 Overview 2 Dynamics 2.1 Introduction to Whole‐Angle Gyroscopes 2.2 Foucault Pendulum Analogy 2.3 Canonical Variables 2.4 Effect of Structural Imperfections 2.5 Challenges of Whole‐Angle Gyroscopes 3 Control Strategies 3.1 Quadrature and Coriolis Duality 3.2 Rate Gyroscope Mechanization 3.3 Whole‐Angle Mechanization 3.4 Conclusions

      6  Part II: 2‐D Micro‐Machined Whole‐Angle Gyroscope Architectures 4 Overview of 2‐D Micro‐Machined Whole‐Angle Gyroscopes 4.1 2‐D Micro‐Machined Whole‐Angle Gyroscope Architectures 4.2 2‐D Micro‐Machining Processes 5 Example 2‐D Micro‐Machined Whole‐Angle Gyroscopes 5.1 A Distributed Mass MEMS Gyroscope – Toroidal Ring Gyroscope 5.2 A Lumped Mass MEMS Gyroscope – Dual Foucault Pendulum Gyroscope

      7  Part III: 3‐D Micro‐Machined Whole‐Angle Gyroscope Architectures 6 Overview of 3‐D Shell Implementations 6.1 Macro‐scale Hemispherical Resonator Gyroscopes 6.2 3‐D Micro‐Shell Fabrication Processes 6.3 Transduction of 3‐D Micro‐Shell Resonators 7 Design and Fabrication of Micro‐glassblown Wineglass Resonators 7.1 Design of Micro‐Glassblown Wineglass Resonators 7.2 An Example Fabrication Process for Micro‐glassblown Wineglass Resonators 7.3 Characterization of Micro‐Glassblown Shells 8 Transduction of Micro‐Glassblown Wineglass Resonators 8.1 Assembled Electrodes 8.2 In‐plane Electrodes 8.3 Fabrication 8.4 Experimental Characterization 8.5 Out‐of‐plane Electrodes 8.6 Design 8.7 Fabrication 8.8 Experimental Characterization 9 Conclusions and Future Trends 9.1 Mechanical Trimming of Structural Imperfections 9.2 Self‐calibration 9.3 Integration and Packaging

      8  References

      9  Index

      10  IEEE Press Series on Sensors

      11  End User License Agreement

      List of Tables

      1 List of AbbreviationsTable 1 Control system abbreviations.Table 2 Mechanical parameters of the resonator.

      2 Chapter 5Table 5.1 Summary of design parameters.Table 5.2 As‐fabricated frequency symmetry of four devices.Table 5.3 Summary of design parameters.

      3 Chapter 7Table 7.1 Comparison of wineglass dimensions obtained from analytical solutio...Table 7.2 Anchor loss analysis shows a large change in

for different stem di...Table 7.3 Sample design parameters for micro‐glassblown mushroom structure.Table 7.4 Sample design parameters for micro‐glassblown hemisphere.

      4 Chapter 8Table 8.1 Table summarizing frequency splits and center frequency of five dif...Table 8.2 Summary of device parameters for a 7 mm fused silica wineglass reso...

      List of Illustrations

      1 Chapter 1Figure 1.1 Coriolis Vibratory Gyroscopes, in their simplest form, consist of...Figure 1.2 Micro‐rate integrating gyroscope (MRIG) architectures.Figure 1.3 Sample Allan variance analysis of gyroscope output, showing error...

      2 Chapter 2Figure