Spectroscopic Ellipsometry. Hiroyuki Fujiwara
Техническая литература.
Spectroscopic Ellipsometry
Год выпуска 0
isbn 9780470060186
Автор произведения Hiroyuki Fujiwara
Издательство John Wiley & Sons Limited
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.