Microsystem Technology. Wolfgang Menz
Техническая литература.
Microsystem Technology
Год выпуска 0
isbn 9783527613014
Автор произведения Wolfgang Menz
Издательство John Wiley & Sons Limited
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.