Lithography. Stefan Landis
Техническая литература.
Lithography
Год выпуска 0
isbn 9781118621233
Автор произведения Stefan Landis
Издательство John Wiley & Sons Limited
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.