Silicon Technologies. Ion Implantation and Thermal Treatment. Annie Baudrant
Техническая литература.
Silicon Technologies. Ion Implantation and Thermal Treatment
Год выпуска 0
isbn 9781118601112
Автор произведения Annie Baudrant
Издательство John Wiley & Sons Limited
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.